ASTM F1372-1993(2005) 气体分配系统组件用金属表面状态的扫描式电子显微镜(SEM)分析的标准试验方法

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【英文标准名称】:StandardTestMethodforScanningElectronMicroscope(SEM)AnalysisofMetallicSurfaceConditionforGasDistributionSystemComponents
【原文标准名称】:气体分配系统组件用金属表面状态的扫描式电子显微镜(SEM)分析的标准试验方法
【标准号】:ASTMF1372-1993(2005)
【标准状态】:现行
【国别】:
【发布日期】:1993
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:F01.10
【标准类型】:(TestMethod)
【标准水平】:()
【中文主题词】:气体分配;精整;金属表面;试验;组件
【英文主题词】:Electronmicroscopy;Gasdistributionsystems;Metalsandmetallicmaterials;Scanningelectronmicroscope(SEM);Semiconductorcleanrooms;Surfaceanalysis-metals/alloys;scanningelectronmicroscope(SEM)analysisofmetallicsurface;condit
【摘要】:Thepurposeofthistestmethodistodefineaprocedurefortestingcomponentsbeingconsideredforinstallationintoahigh-puritygasdistributionsystem.Applicationofthistestmethodisexpectedtoyieldcomparabledataamongcomponentstestedforpurposesofqualificationforthisinstallation.1.1Thistestmethodcoversthetestingofinteriorsurfacesofcomponentssuchastubing,fittings,andvalvesforsurfacemorphology.1.2Thistestmethodappliestoallsurfacesoftubing,connectors,regulators,valves,andanymetalcomponent,regardlessofsize.1.3Limitations:1.3.1ThismethodologyassumesaSEMoperatorskillleveltypicallyachievedovera12-monthperiod.1.3.2Thistestmethodshallbelimitedtotheassessmentofpits,stringer,tears,grooves,scratches,inclusions,steppedgrainboundaries,andothersurfaceanomalies.However,stainsandparticlesthatmaybeproducedduringspecimenpreparationshouldbeexcludedintheassessmentofanomalies.1.4ThevaluesstatedinSIunitsaretoberegardedasthestandard.Theinch-poundunitsgiveninparenthesesareforinformationonly.1.5Thisstandarddoesnotpurporttoaddressallofthesafetyproblems,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.SpecifichazardstatementsaregiveninSection6.
【中国标准分类号】:E97
【国际标准分类号】:17_040_20
【页数】:4P.;A4
【正文语种】: